Computers and Industrial Engineering
Integrating targeted cycle-time reduction into the capital planning process
Proceedings of the 30th conference on Winter simulation
A GA-Tabu algorithm for scheduling in-line steppers in low-yield scenarios
Expert Systems with Applications: An International Journal
Interim equipment shutdown planning for a wafer fab during economic downturns
Computers and Industrial Engineering
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Wafer manufacturers must make decisions regarding tool elimination due to changes caused by demand, product mixes, and overseas fab capacity expansion. Such a problem is raised by leading semiconductor manufacturers in Taiwan. This paper is aimed at developing a sound mechanism for tool portfolio elimination based on determining which equipment can be pruned. In the proposed mechanism, product mix, wafer output, capital expenditure, tool utilization, protective capacity, and cycle time are taken into the overall evaluation. This paper develops an integer programming model to avoid trial-and-error and to obtain the optimal solution. Compared to the current industry approach, the results show that the proposed mechanism can effectively identify the correct tools for elimination with a large capital savings and little cycle time impact.