Design and simulation of a micromachined accelerometer

  • Authors:

  • Hazem Hassan;Hassan Ibrahim;Salah Elsedawy

  • Affiliations:

  • Electronics and Communication Engineering, Arab Academy for Science and Technology and Maritime Transport, Egypt;Electronics and Communication Engineering, Arab Academy for Science and Technology and Maritime Transport, Egypt;Electronics and Communication Engineering, Arab Academy for Science and Technology and Maritime Transport, Egypt

  • Venue:
  • ISTASC'07 Proceedings of the 7th Conference on 7th WSEAS International Conference on Systems Theory and Scientific Computation - Volume 7
  • Year:
  • 2007

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Abstract

The model parameters of the micromachined tunnelling accelerometer have a significant effect on the accelerometer's performance, including its range, bandwidth, sensitivity, accuracy and even the interfacing circuitry. This paper presents the design, simulation and development of a low voltage micromachined tunnelling microaccelerometer and the effects of parameter on the accelerometer's performance. The derivation of the sensing accelerometer model will be discussed. With the use of the MATLAB simulation program, the real world effects of the various parameters are revealed.