Recent advances in the automatic inspection of integrated circuits for pattern defects
Machine Vision and Applications
A survey of automated visual inspection
Computer Vision and Image Understanding
An in-camera data stream processing system for defect detection in Web inspection tasks
Real-Time Imaging - Special issue on real-time defect detection
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In this paper, we propose a novel defects inspection algorithm for TFT-LCD panels. We first compensate the distorted image caused by poor illumination circumstances, and compare it with the reference pattern to inspect the arrangement of the pattern on the panel. Based on the reference frame, an error value image map that shows the distribution of defects is finally obtained. The simulation example shows that our algorithm not only inspects the LCD defects well, but also is robust to the 1-pixel error.