Center embossed diaphragm design guidelines and Fabry-Perot diaphragm fiber optic sensor

Authors:
Yan Sun;Ganhua Feng;George Georgiou;Edip Niver;Karen Noe;Ken Chin
Affiliations:
New Jersey Institute of Technology, Department of Physics, Tiernan Hall, Newark, NJ 07102, USA;New Jersey Institute of Technology, Department of Physics, Tiernan Hall, Newark, NJ 07102, USA;New Jersey Institute of Technology, Department of Physics, Tiernan Hall, Newark, NJ 07102, USA;New Jersey Institute of Technology, Department of Physics, Tiernan Hall, Newark, NJ 07102, USA;PSE&G Corporation, (T-10A) 80 Park Plaza, P.O. Box 570, Newark, NJ 07102, USA;New Jersey Institute of Technology, Department of Physics, Tiernan Hall, Newark, NJ 07102, USA
Venue:
Microelectronics Journal
Year:
2008

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Cited 1

Modeling an optical diaphragm for human pulse pressure detection

MINO'09 Proceedings of the 8th WSEAS international conference on Microelectronics, nanoelectronics, optoelectronics

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Abstract

This research established the design guidelines for center embossed diaphragms for micro-diaphragm fiber type sensors. Following the guidelines, a center embossed diaphragm fiber optic sensor (CE-DFOS) based on Fabry-Perot interference was designed and fabricated with micro-electro-mechanical system (MEMS) technology. The CE-DFOS was experimentally verified to have the designed intrinsic frequency, and demonstrated high sensitivity in parallel testing with a piezoelectric (PZT) sensor.