Empirical modeling in the area of technological process optimization and optimization of the burn-in process of electronic devices

  • Authors:
  • Radovan Novotny

  • Affiliations:
  • Department of Microelectronics, Brno University of Technology, Brno, Czech Republic

  • Venue:
  • MAASE'08 Proceedings of the 1st WSEAS International Conference on Multivariate Analysis and its Application in Science and Engineering
  • Year:
  • 2008

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Abstract

Monitor the microelectronics structures stability, consistency and overall performance need to study variation and influence of various technological factors. This article presents some important aspects related to the observation and analysis of the influence more than one variable at a time on the response of interest. Examples for creating maps of performance stability for supposed device operating conditions and related experience of realized studies are recapitulated here.