Coloured Petri nets (2nd ed.): basic concepts, analysis methods and practical use: volume 1
Coloured Petri nets (2nd ed.): basic concepts, analysis methods and practical use: volume 1
Modeling with colored timed object-oriented Petri nets for automated manufacturing systems
Computers and Industrial Engineering
Computers and Industrial Engineering
A distributed shifting bottleneck heuristic for complex job shops
Computers and Industrial Engineering
Intelligent distributed and supervised flow control methodology for production systems
Engineering Applications of Artificial Intelligence
ETFA'09 Proceedings of the 14th IEEE international conference on Emerging technologies & factory automation
Scheduling algorithms for a semiconductor probing facility
Computers and Operations Research
Development of a multi-agent-based distributed simulation platform for semiconductor manufacturing
Expert Systems with Applications: An International Journal
Journal of Intelligent Manufacturing
Computers and Industrial Engineering
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Implementing efficient scheduling and dispatching policies is a critical means to gain competitiveness for modern semiconductor manufacturing systems. In contemporary global market, a successful semiconductor manufacturer has to excel in multiple performance indices, consequently qualified scheduling approaches should provide efficient and holistic management of wafer products, information and manufacturing resources and make adaptive decisions based on real-time processing status to reach an overall optimized system performance. To cope with this challenge, a timed extended object-oriented Petri nets (EOPNs) based multiple-objective scheduling and real-time dispatching approach is proposed in this paper. Four performance objectives pursued by semiconductor manufacturers are integrated into a priority-ranking algorithm that serves as the initial scheduling guidance, and then all wafer lots will be dynamically dispatched by the hybrid real-time dispatching control system. A set of simulation experiments validate the proposed multiple-objective scheduling and real-time dispatching algorithm may achieve satisfactory performances.