Technological process optimisation and process characterisation in relation to the quality assessment

Authors:
Radovan Novotny
Affiliations:
Department of Microelectronics, Brno University of Technology, Brno, Czech Republic
Venue:
WSEAS Transactions on Circuits and Systems
Year:
2008

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Abstract

In order to optimise and characterize technological processes for quality planning, evaluation and development purposes must be used proper methodology. Methodology for designed experiment and uncertainty can be one possible way to do this. Variation and effect of various technological factors in relation to the material structures stability, consistency and overall performance in the relation to the important aspects related to the observation and analysis of the influence more than one variable at a time on the response of interest.