Data mining for yield enhancement in semiconductor manufacturing and an empirical study
Expert Systems with Applications: An International Journal
A Bayesian ranking scheme for supporting cost-effectiveyield diagnosis services
CASE'09 Proceedings of the fifth annual IEEE international conference on Automation science and engineering
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This paper studies the issues of designing a Bayesian framework for the reliable diagnosis of various yield-loss factors induced in semiconductor manufacturing. The proposed framework integrates both the results from knowledge-based and data-driven inference tools as input data, where the former resembles expert's knowledge on diagnosing pre-known yield-loss factors while the latter serves for exploring new yield-loss factors. Three modules with specific designs for yield diagnosis applications are addressed: Pre-Process for generating candidate factors and corresponding prior distributions, Bayesian Inference for calculating posterior distributions, and Post-Process for deriving reliable rankings of candidate factors. The final output, a Bubble Diagram with Pareto Frontier, provides visual interpretations on the integral results from data-driven, knowledge-based and Bayesian inference tools. Specific issues addressed in the proposed Bayesian framework provide directions for implementing a real system.