Semiconductor fabrication facility design using a hybrid search methodology
Computers and Industrial Engineering
Systems engineering and design of high-tech factories
Proceedings of the 38th conference on Winter simulation
System and simulation modeling using SysML
Proceedings of the 39th conference on Winter simulation: 40 years! The best is yet to come
Are simulation standards in our future?
Winter Simulation Conference
A simple example of SysML-driven simulation
Winter Simulation Conference
Logistics systems modeling and simulation
Proceedings of the Winter Simulation Conference
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Contemporary factories in capital intensive industries such as semiconductor manufacturing are very complex, with many sources of risk. The highly competitive and global business environment forces companies to analyze, design, and continuously re-design factories with distributed multi-disciplinary teams. Traditional factory design approaches using spreadsheets and stand-alone simulations cannot adequately cope with the resulting time, cost, and risk requirements. In this paper, we address the opportunity to support fab design teams by providing on-demand simulation. The method for achieving this combines formal fab descriptive models with a process for generating fab analysis models from relatively standard sources of fab data.