Binary Nonnegative Matrix Factorization Applied to Semi-conductor Wafer Test Sets

  • Authors:
  • Reinhard Schachtner;Gerhard Pöppel;Elmar W. Lang

  • Affiliations:
  • Infineon Technologies AG, Regensburg, Germany 93049 and CIMLG / Biophysics, University of Regensburg, Regensburg, Germany 93040;Infineon Technologies AG, Regensburg, Germany 93049;CIMLG / Biophysics, University of Regensburg, Regensburg, Germany 93040

  • Venue:
  • ICA '09 Proceedings of the 8th International Conference on Independent Component Analysis and Signal Separation
  • Year:
  • 2009

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Abstract

We introduce a probabilistic extension of non-negative matrix factorization (NMF) by considering binary coded images as a probabilistic superposition of underlying continuous-valued elementary patterns. We provide an appropriate algorithm to solve the related optimization problem with non-negativity constraints which represents an extension of the well-known NMF-algorithm to binary-valued data sets. We demonstrate the performance of our method by applying it to the detection and characterization of hidden causes for failures during semi-conductor wafer processing. We decompose binary coded (pass/fail) wafer test data into underlying elementary failure patterns and study their influence on the performance of single wafers during testing.