CMAC-Based PID Control of an XY Parallel Micropositioning Stage

Authors:
Qingsong Xu;Yangmin Li
Affiliations:
Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Macao SAR, China;Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Macao SAR, China
Venue:
ISNN 2009 Proceedings of the 6th International Symposium on Neural Networks: Advances in Neural Networks - Part II
Year:
2009

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Abstract

This paper presents the controller design of an XY parallel micropositioning stage aiming at a sub-micron accuracy for micro scale manipulation. Owning to the decoupled design of the mechanism, a simple single-input-single-output (SISO) PID controller is adopted for each axis. To compensate for the hysteresis arising from piezoelectric actuator, credit assigned CMAC (cerebellar model articulation controller) neural network with adjustable learning rate is employed into the PID control. Experimental results show that the hysteresis of the stage has been significantly reduced by the CMAC-based PID controller and the stage can achieve a sub-micron positioning accuracy, which demonstrate the effectiveness of the designed controller as well.