Microchip Fabrication, 5th Ed.

  • Authors:

  • Peter Van Zant

  • Affiliations:

  • -

  • Venue:
  • Microchip Fabrication, 5th Ed.
  • Year:
  • 2004

Quantified Score

Hi-index 0.00

Visualization

Abstract

Table of contentsThe Semiconductor IndustryInternational Technology Roadmap for SemiconductorsSemiconductor Materials and Process ChemicalsManufacturing WafersOverview of Wafer Fabrication300mm wafer diameter processingContamination ControlProcess YieldsNanotechnology ProcessesOxidationBasic Patterning -- Surface Preparation to ExposureBasic Patterning -- Developing to Final InspectionAdvanced Photolithography ProcessesDopingDeposition of Dielectrics and Semiconductor LayersMetalization: Wiring the Chip CompositesProcess and Device EvaluationThe Business of Water FabricationGreen ProcessingSemiconductor Devices and Integrated Circuit FormationNanotechnology DevicesIntegrated Circuit TypesPackagingGLOSSARY