An expert advisor for photolithography

  • Authors:
  • Terry Cline;Wendy Fong;Steven Rosenberg

  • Affiliations:
  • Hewlett-Packard Laboratories, Palo Alto, CA;Hewlett-Packard Laboratories, Palo Alto, CA;Hewlett-Packard Laboratories, Palo Alto, CA

  • Venue:
  • IJCAI'85 Proceedings of the 9th international joint conference on Artificial intelligence - Volume 1
  • Year:
  • 1985

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Abstract

The Photolithography Advisor is a program for the diagnosis and correction of negative resist photolithography defects occurring during integrated circuit fabrication. Given a set of observed symptoms on a wafer, the Advisor diagnoses defects due to these symptoms and recommends corrective action for each. An early prototype of the program was tested in a research lab, where experimental ICs were processed. A more thorough experiment is now in progress to measure the system's performance in a manufacturing environment.