On-line measurement of paging behavior by the multivalued MIN algorithm

  • Authors:
  • L. A. Belady;F. P. Palerrno

  • Affiliations:
  • Thomas J. Watson Research Center, Yorktown Heights, New York;IBM Research Division Laboratory, San Jose, California

  • Venue:
  • IBM Journal of Research and Development
  • Year:
  • 1974

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Abstract

The use of water vapor as an oxidant in place of oxygen enables a wide range of surface concentrations to be obtained in a single-step process. The concentration of boron at the silicon surface is found not to be constant throughout the diffusion process ...