Optimal design of an electrostatically actuated microbeam for maximum pull-in voltage

Authors:
Mostafa M. Abdalla;Chevva Konda Reddy;Waleed F. Faris;Zafer Gürdal
Affiliations:
Department of Aerospace and Ocean Engineering, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061-MC0203, USA;Department of Engineering Science and Mechanics, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061-MC0219, USA;Department of Engineering Science and Mechanics, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061-MC0219, USA;Department of Aerospace and Ocean Engineering, Virginia Polytechnic Institute and State University, Blacksburg, VA 24061-MC0203, USA and Department of Engineering Science and Mechanics, Virginia P ...
Venue:
Computers and Structures
Year:
2005

Citing 1
Cited 2

Microsystem design

Microsystem design

Electro-dynamic behavior of an electrically actuated micro-beam: Effects of initial curvature and nonlinear deformation

Computers and Structures
Shape optimization of electrostatically actuated microbeams for extending static and dynamic operating ranges

Structural and Multidisciplinary Optimization

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Abstract

We consider optimizing the shape of a capacitive micro-beam for maximum pull-in voltage. The problem is discretized using finite elements. The normal flow algorithm is used to trace the nonlinear voltage displacement curve and find the pull-in point. Optimal width and thickness distributions are obtained for different beam boundary conditions using a resizing scheme based on optimality criterion. The results indicate that substantial increase in pull-in voltage can be achieved by varying the width and/or thickness distribution.