Constant force feedback controller design using fuzzy technique for a tapping mode atomic force microscope

  • Authors:

  • Yuan-Jay Wang

  • Affiliations:

  • Department of Electrical Engineering, TungNan University, Taipei, Taiwan

  • Venue:
  • CCDC'09 Proceedings of the 21st annual international conference on Chinese control and decision conference
  • Year:
  • 2009

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Abstract

A constant force feedback mechanism based on fuzzy logic for a tapping mode Atomic Force Microscope is proposed in this paper. A nonlinear dynamic model for characterizing the cantilever-sample interaction is first developed. Then, a PD-like fuzzy controller is designed to overcome the shortcomings of a traditional PID controller in a tapping mode Atomic Force Microscope. By using the PD-like fuzzy controller, the cantilever tip can track the surface of the sample rapidly and accurately even though the topology of the surface is arbitrary and not given a priori. The rapid tracking response allows us to observe high aspect ratio micro structure accurately and quickly. In final, a computer simulation is provided to demonstrate the effectiveness and confirm validity of the proposed controller.