The study of modeling and controlling for evaporation source in vacuum coating

  • Authors:

  • Yanzhe Li;Duowang Fan;Shuben Yang;Linggang Kong;Qingfang Teng

  • Affiliations:

  • Education Ministry Key Lab. of Opt-Elect. Techn. and Intelligent Control State Green Coating Techn. and Equipment Eng. and Tech. Res. Centre, LanZhou Jiaotong Univ., China and Sch. of Automatizati ...;Education Ministry Key Laboratory of Opt-Electronic Technology and Intelligent Control State Green Coating Technology and Equipment Engineering and Technology Research Centre, LanZhou Jiaotong Uni ...;Education Ministry Key Laboratory of Opt-Electronic Technology and Intelligent Control State Green Coating Technology and Equipment Engineering and Technology Research Centre, LanZhou Jiaotong Uni ...;Education Ministry Key Laboratory of Opt-Electronic Technology and Intelligent Control State Green Coating Technology and Equipment Engineering and Technology Research Centre, LanZhou Jiaotong Uni ...;Education Ministry Key Lab. of Opt-Elect. Techn. and Intelligent Control State Green Coating Techn. and Equipment Eng. and Tech. Res. Centre, LanZhou Jiaotong Univ., China and Sch. of Automatizati ...

  • Venue:
  • CCDC'09 Proceedings of the 21st annual international conference on Chinese control and decision conference
  • Year:
  • 2009

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Abstract

According to energy conversation and thermodynamics theory, the transfer function model of evaporation source in vacuum coating can be built up. With respect to the problem that parameters of evaporation source change greatly, the conventional PID control hardly ensures stability of system, manpower intervention is largely need during coating process, and the quality of coating film is unstable, this paper suggests a method using the variables of deviation and deviation changes to distinguish closed-loop system stability. Based on this, a control method of the PI parameters self-tuning real-time online by fuzzy is introduced. The simulation results show that the evaporation source control method of the PI parameters self-tuning real-time online by fuzzy has well control effectiveness in evaporation source closed-loop system stability.