A fast-developing and low-cost characterization and test environment for a double axis resonating micromirror

Authors:
Francesco Battini;Emilio Volpi;Eleonora Marchetti;Tommaso Cecchini;Francesco Sechi;Luca Fanucci;Ulrich Hofmann
Affiliations:
Department of Information Engineering, University of Pisa, via Caruso 16, I-56122 Pisa, Italy;Department of Information Engineering, University of Pisa, via Caruso 16, I-56122 Pisa, Italy;Department of Information Engineering, University of Pisa, via Caruso 16, I-56122 Pisa, Italy;Department of Information Engineering, University of Pisa, via Caruso 16, I-56122 Pisa, Italy;Department of Information Engineering, University of Pisa, via Caruso 16, I-56122 Pisa, Italy;Department of Information Engineering, University of Pisa, via Caruso 16, I-56122 Pisa, Italy;Fraunhofer Institute for Silicon Technology ISIT, Itzehoe, Germany
Venue:
Microelectronics Journal
Year:
2010

Citing 4
Cited 0

Platform-Based Design and Software Design Methodology for Embedded Systems

IEEE Design & Test
Design and Test of MEMs

VLSID '99 Proceedings of the 12th International Conference on VLSI Design - 'VLSI for the Information Appliance'
Testing of MEMS-Based Microsystems

ETS '05 Proceedings of the 10th IEEE European Symposium on Test
Low-g accelerometer fast prototyping for automotive applications

Proceedings of the conference on Design, automation and test in Europe

Quantified Score

Hi-index	0.00

Visualization

Abstract

Testing and characterization of micro-electro-mechanical systems (MEMS) and micro-opto-electro-mechanical systems (MOEMS) can be very challenging due to the multi-domain nature of these devices. Nowadays high volume, high-cost, and accurate measuring systems are necessary to characterize and test MEMS and MOEMS especially to examine their motions, deflections, and resonance frequencies. This paper presents a fast-developing and low-cost environment for MEMS and MOEMS testing and characterization. The environment is based on a flexible mixed-signal platform named Intelligent Sensor InterFace (ISIF). As a case study we consider the characterization of a double axis scanning micromirror. The testing environment has been validated by comparing measurement results with results obtained by the finite element method simulations performed with Comsol Multiphysics. Finally, these results have been exploited to create an electrical equivalent model of the micromirror.