Digital Control of Dynamic Systems
Digital Control of Dynamic Systems
Assembly and manipulation of micro devices-A state of the art survey
Robotics and Computer-Integrated Manufacturing
Design and analysis of a totally decoupled flexure-based XY parallel micromanipulator
IEEE Transactions on Robotics - Special issue on rehabilitation robotics
Disturbance observer-based hysteresis compensation for piezoelectric actuators
ACC'09 Proceedings of the 2009 conference on American Control Conference
Design, Identification, and Control of a Flexure-Based XY Stage for Fast Nanoscale Positioning
IEEE Transactions on Nanotechnology
Dynamic compensation and H ∞ control for piezoelectric actuators based on the inverse Bouc-Wen model
Robotics and Computer-Integrated Manufacturing
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Motion tracking is an important problem in micropositioning systems dedicated to ultra-precision robotic micromanipulation. This paper investigates the periodic motion tracking performance of a micropositioning system based on an empirical tracking performance index (TPI), which is proposed with the consideration of both tracking errors and tracking frequencies. To improve the TPI of a micropositioning system with piezoelectric actuation, a two-loop controller consisting of an H"~ robust controller and a disturbance observer is implemented. Experimental studies are conducted on an XY parallel micropositioning system for the motion tracking tests. Results demonstrate that a sole H"~ robust controller is insufficient to produce a satisfactory tracking performance with low-frequency control. In contrast, the two-loop controller endows the system with both a lower tracking error and a better TPI than the conventional robust control does. The experimental results not only validate the effectiveness of the proposed control method in improving tracking performance but also confirm the feasibility of the TPI in quantitatively characterizing the performance of a micropositioning system.