Development of expert decision model to monitor precision of solar silicon wafer machine line

Authors:
Che-Wei Chang;Chung-Chih Chen
Affiliations:
Department of Information Management, Yuanpei University, 306 Yuanpei St., Hsin Chu 30015, Taiwan, ROC;Environment Engineering Department, Engineering Research & Develop Center, MiTAC International Corp., No. 200, Wen Hwa 2nd Rd., Kuei Shan Hsiang, Taoyuan 333, Taiwan, ROC
Venue:
Computers and Industrial Engineering
Year:
2010

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Abstract

In this study, we develop a two-stage decision model for managing uncertainty and imprecision of solar silicon wafer slicing evaluations during a wafer manufacturing process. Stage 1 is the evaluation process, which is performed by a procedure based on a combination of the fuzzy analytic hierarchy process (AHP) and the TOPSIS method. Stage 2 is the verification process, in which process capability indices are calculated to verify the feasibility and effectiveness of the proposed methods.