The nature of statistical learning theory
The nature of statistical learning theory
Control chart tests based on geometric moving averages
Technometrics
Application of wrapper approach and composite classifier to the stock trend prediction
Expert Systems with Applications: An International Journal
Expert Systems with Applications: An International Journal
Support vector machines for credit scoring and discovery of significant features
Expert Systems with Applications: An International Journal
Classification of audio signals using SVM and RBFNN
Expert Systems with Applications: An International Journal
Induction machine fault detection using clone selection programming
Expert Systems with Applications: An International Journal
Mining the customer credit using hybrid support vector machine technique
Expert Systems with Applications: An International Journal
Support vector machines for histogram-based image classification
IEEE Transactions on Neural Networks
Hi-index | 12.05 |
Quality control is attracting more attention in semiconductor market due to harsh competition. This paper considers Fault Detection (FD), a well-known philosophy in quality control. Conventional methods, such as non-stationary SPC chart, PCA, PLS, and Hotelling's T^2, are widely used to detect faults. However, even for identical processes, the process time differs. Missing data may hinder fault detection. Artificial intelligence (AI) techniques are used to deal with these problems. In this paper, a new fault detection method using spline regression and Support Vector Machine (SVM) is proposed. For a given process signal, spline regression is applied regarding step changing points as knot points. The coefficients multiplied to the basis of the spline function are considered as the features for the signal. SVM uses those extracted features as input variables to construct the classifier for fault detection. Numerical experiments are conducted in the case of artificial data that replicates semiconductor manufacturing signals to evaluate the performance of the proposed method.