Low-frequency piezoelectric energy harvesting prototype suitable for the MEMS implementation

  • Authors:
  • Lei Gu

  • Affiliations:
  • Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, MA 02139, USA

  • Venue:
  • Microelectronics Journal
  • Year:
  • 2011

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Abstract

A low-frequency piezoelectric energy harvester based on impact vibration assembled with a compliant driving beam and two rigid generating beams is presented. The ambient low frequency is up-converted to high resonant frequency by the periodic impact between the driving beam and the generating beams. The advantages of the harvester are: restricting the large displacement of the compliant driving beam, improving power density and being especially suitable for a compact MEMS approach. The 1.53mW average power of the macroscale impact vibration harvester is achieved at 20.1Hz under 0.4g acceleration. The power density is 93.2@mW/cm^3, which is 6.8 times that of conventional counterpart (13.6@mW/cm^3). The measured results demonstrate the potential of the device applied to portable and implantable electronics benefited from the MEMS batch-fabrication technology.