Microsystem design
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MEMS devices with harmonic oscillators resonating at specific frequency are useful in variety ofapplications. One of these applications that demands high and accurate resonant frequency is optical scannersfor display applications. Due to the large tolerances of MEMS fabrication a calibration is required to achieveaccuracy in resonance frequency. In this paper we present a novel technique for frequency trimming andspring stiffness trimming. The proposed technique is one time one direction frequency trimming and is basedon anisotropic wet etching process, the same process used for fabrication of the device itself. We also presentsome preliminary results of resonant frequency of micro-mirror scanner devices for display applications beforeand after trimming process.