A clustering technique for defect inspection

Authors:
Z. W. Zhong;N. G. Shankar
Affiliations:
School of Mechanical & Aerospace Engineering, Nanyang Technological University, Singapore;Euro Technology Pte Ltd, Singapore
Venue:
EC'05 Proceedings of the 6th WSEAS international conference on Evolutionary computing
Year:
2005

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Abstract

A system of rules was developed to join disconnected clusters based on the location of the defects for semiconductor defect inspection. The clusters are evaluated on a pair-wise basis using the rules and are joined or not joined based on a threshold. The system continuously re-evaluates the clusters under consideration as the rules change with each joining action. The technique to measure the features and the methods to improve the system speed are developed. The technique proved very effective in field tests for semiconductor inspection applications.