A capacitive tactile sensor array for surface texture discrimination

  • Authors:

  • H. B. Muhammad;C. Recchiuto;C. M. Oddo;L. Beccai;C. J. Anthony;M. J. Adams;M. C. Carrozza;M. C. L. Ward

  • Affiliations:

  • Bio-medical and Micro Engineering Research Centre, School of Mechanical Engineering, University of Birmingham, Edgbaston, Birmingham, United Kingdom;Advanced Robotics Technology and Systems Laboratory, Polo Sant'Anna Valdera - Scuola Superiore Sant'Anna, Pontedera, PI 56025, Italy;Advanced Robotics Technology and Systems Laboratory, Polo Sant'Anna Valdera - Scuola Superiore Sant'Anna, Pontedera, PI 56025, Italy;Center for Micro-BioRobotics@SSSA, Istituto Italiano di Tecnologia (IIT), Pontedera, PI 56025, Italy;Bio-medical and Micro Engineering Research Centre, School of Mechanical Engineering, University of Birmingham, Edgbaston, Birmingham, United Kingdom;Bio-medical and Micro Engineering Research Centre, School of Mechanical Engineering, University of Birmingham, Edgbaston, Birmingham, United Kingdom;Advanced Robotics Technology and Systems Laboratory, Polo Sant'Anna Valdera - Scuola Superiore Sant'Anna, Pontedera, PI 56025, Italy;Bio-medical and Micro Engineering Research Centre, School of Mechanical Engineering, University of Birmingham, Edgbaston, Birmingham, United Kingdom

  • Venue:
  • Microelectronic Engineering
  • Year:
  • 2011

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Abstract

This paper presents a silicon MEMS based capacitive sensing array, which has the ability to resolve forces in the sub mN range, provides directional response to applied loading and has the ability to differentiate between surface textures. Texture recognition is achieved by scanning surfaces over the sensing array and assessing the frequency spectrum of the sensor outputs.