Three-dimensional reconstruction for scanning electron microscope

Authors:
D. A. Zolotukhin;I. V. Safonov;K. A. Kryzhanovsky
Affiliations:
National Research Nuclear University MEPhI, Moscow, Russia 115409;National Research Nuclear University MEPhI, Moscow, Russia 115409;National Research Nuclear University MEPhI, Moscow, Russia 115409
Venue:
Pattern Recognition and Image Analysis
Year:
2011

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Abstract

The paper describes the reconstruction algorithm of the 3D shape of a microobject's surface based on an image stereopair, acquired with a Scanning Electron Microscope (SEM). Presented is the model of constructing the image in a SEM. The corresponding points are detected by using the SIFT algorithm. Employing the RANSAC method the points of correspondence are used to define the relative position of an object in a stereopair. A point cloud is created in a 3D space and interpolated in order to reconstruct a 3D surface.