A multiple-state micro-mechanical programmable memory

Authors:
Rafmag Cabrera;Emmanuelle Merced;Noraica Dávila;Félix E. Fernández;Nelson Sepúlveda
Affiliations:
Electrical and Computer Engineering Department, University of Puerto Rico-Mayaguez, Mayaguez, PR, USA;Electrical and Computer Engineering Department, University of Puerto Rico-Mayaguez, Mayaguez, PR, USA;Electrical and Computer Engineering Department, University of Puerto Rico-Mayaguez, Mayaguez, PR, USA;Physics Department, University of Puerto Rico-Mayaguez, Mayaguez, PR, USA;Applied Materials Group, Electrical and Computer Engineering Department, Michigan State University, East Lansing, MI, USA
Venue:
Microelectronic Engineering
Year:
2011

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Abstract

This paper reports a multiple-state micro-mechanical memory. The tip displacements of a 350@mm long VO"2-coated micro-mechanical silicon cantilever were programmed to absolute displacements ranging from -19 to -7m. Ten non-uniform mechanical states were programmed using controlled linearly increasing laser pulses. The uniformity of the mechanical states was improved by using non-linearly increasing laser pulses. The programmed states are reset by driving the VO"2 outside the hysteretic region.