Microsystem design
Non-conforming element for accurate modelling of MEMS
Finite Elements in Analysis and Design
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This paper presents a primal/dual approach to solve the coupled electromechanical problem arising in the modelling of electrostatically actuated micro-electromechanical systems (MEMS). After a derivation of complementary energy functionals for both the mechanical and the electrical problems, an original coupling strategy using a displacement-based (primal) mechanical formulation and an electric vector potential-based (dual) electrostatic formulation are elaborated. A derivation of the electric force and the tangent stiffness matrix of the coupled problem is obtained, based on the virtual work principle. The new formulation has interesting properties with respect to error estimation and pull-in voltage calculation, which is highlighted on the finite element solution of a micro-resonator structure.