International Journal of Robotics Research
OctoMag: an electromagnetic system for 5-DOF wireless micromanipulation
IEEE Transactions on Robotics
Development and dynamic modeling of a new hybrid thermopiezoelectric microactuator
IEEE Transactions on Robotics
Multimodal Electrothermal Silicon Microgrippers for Nanotube Manipulation
IEEE Transactions on Nanotechnology
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Microactuators are an important tool for precise manipulation of components and materials in nanotechnologies. The problems of design and application of microactuators for micro- and nanopositioning, microassembly, and microrobotics are considered in this paper. The basic parameters and models of piezoelectric, magnetostriction, electromagnetic, electrostatic, electrothermal, and hybrid microactuators are described. A general information approach that implies the description of physical models used in order to analyze microactuator behavior and optimize their design is considered.