Fast optical and process proximity correction algorithms for integrated circuit manufacturing
Fast optical and process proximity correction algorithms for integrated circuit manufacturing
FPGA-Based Hardware Acceleration of Lithographic Aerial Image Simulation
ACM Transactions on Reconfigurable Technology and Systems (TRETS)
Programming Massively Parallel Processors: A Hands-on Approach
Programming Massively Parallel Processors: A Hands-on Approach
Efficient aerial image simulation on multi-core SIMD CPU
Proceedings of the International Conference on Computer-Aided Design
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Aerial image simulation is a fundamental problem for modern VLSI design. It requires a huge amount of numerical computation. The recent advancement of general purpose GPU computing provides an excellent opportunity to parallelize the aerial image simulation and achieve great speedup. In this paper, we present and discuss two GPU-based aerial image simulation algorithms. We show through experiments that the fastest algorithm we propose can achieve 50X to 60X speedup over the CPU based serial algorithm. The error of our approach is shown to be insignificant.