Full fabrication simulation of 300mm wafer focused on AMHS (automated material handling systems)

Authors:
Youngshin Han;Dongsik Park;Sangwon Chae;Chilgee Lee
Affiliations:
School of Information and Communication Engineering, Sungkyunkwan University, Suwon, Kyunggi-do, S. Korea;School of Information and Communication Engineering, Sungkyunkwan University, Suwon, Kyunggi-do, S. Korea;School of Information and Communication Engineering, Sungkyunkwan University, Suwon, Kyunggi-do, S. Korea;School of Information and Communication Engineering, Sungkyunkwan University, Suwon, Kyunggi-do, S. Korea
Venue:
AsiaSim'04 Proceedings of the Third Asian simulation conference on Systems Modeling and Simulation: theory and applications
Year:
2004

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Abstract

Semiconductor fabrication lines are organized using bays, equipment, and stockers. Most 300mm wafer lines use AMHS (Automated Material Handling System) for inter-bay and intra-bay lot transportation. In particular, the inter-bay AMHS moves lots between stockers, whereas intra-bay AMHS moves lots between stockers and tools, or between tools within the same bay. The key concern for manufacturer is how to raise productivity and to reduce turn-around time. This paper presents a simulation to reduce turn around time and raise productivity by reducing the delivery time (which affects AMHS).