An improved parallel MEMS processing-level simulation implementation using graphic processing unit

Authors:
Yupeng Guo;Xiaoguang Liu;Gang Wang;Fan Zhang;Xin Zhao
Affiliations:
Nankai-Baidu Joint Lab, Inst. of Robotics and Information Automatic System, College of I.T., Nankai University, Tianjin, China;Nankai-Baidu Joint Lab, Inst. of Robotics and Information Automatic System, College of I.T., Nankai University, Tianjin, China;Nankai-Baidu Joint Lab, Inst. of Robotics and Information Automatic System, College of I.T., Nankai University, Tianjin, China;Nankai-Baidu Joint Lab, Inst. of Robotics and Information Automatic System, College of I.T., Nankai University, Tianjin, China;Nankai-Baidu Joint Lab, Inst. of Robotics and Information Automatic System, College of I.T., Nankai University, Tianjin, China
Venue:
ICA3PP'10 Proceedings of the 10th international conference on Algorithms and Architectures for Parallel Processing - Volume Part II
Year:
2010

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Abstract

Micro-Electro–Mechanical System (MEMS) is the integration of mechanical elements, sensors, actuators, and electronics on a common silicon substrate through micro fabrication technology. With MEMS technologies, micron-scale sensors and other smart products can be manufactured. Because of its micron-scale, MEMS products' structure is nearly invisible, even the designer is hard to know whether the device is well-designed and well-produced. So a visual 3D MEMS simulation implement, named ZProcess[1], was proposed in our previous work to help designers realizing and improving their designs. ZProcess shows the MEMS device's 3D model using voxel method. It's accurate, but its speed is unacceptable when the scale of voxel-data is large. In this paper, an improved parallel MEMS simulation implementation is presented to accelerate ZProcess by using GPU (Graphic Processing Unit). The experimental results show the parallel implement gets maximum 160 times speed up comparing with the sequential program.