Atomic hydrogen-induced degradation of the Si/SiO2 structure

• Authors:

• E. Cartier;J. H. Stathis

• Affiliations:

• T. J. Watson Research Center, Yorktown Heights, NY;T. J. Watson Research Center, Yorktown Heights, NY

• Venue:
• INFOS '95 Proceedings of the 9th biennial conference on Insulating films on semiconductors
• Year:
• 1995