Strain microgauge implementation on cylindrical metal substrates

  • Authors:
  • W. Yang;A. Bonvilain;F. Gustavo;S. Basrour

  • Affiliations:
  • TIMA Laboratory (CNRS-UJF-Grenoble INP), Grenoble 38000, France;TIMA Laboratory (CNRS-UJF-Grenoble INP), Grenoble 38000, France;CEA-INAC, Grenoble 38000, France;TIMA Laboratory (CNRS-UJF-Grenoble INP), Grenoble 38000, France

  • Venue:
  • Microelectronic Engineering
  • Year:
  • 2012

Quantified Score

Hi-index 2.88

Visualization

Abstract

This work mainly focuses on the development of germanium-based thin-film piezoresistive strain gauges on thin NiTi and stainless steel cylinders. These microgauges enable the real-time measurement of the cylinder's strain distribution from which its deflection status can be deduced, based on an analytical mechanical model of thin cantilever beams. The adaptation of thin cylinders to typical micromachining equipment requires several adjustments in preparation works. The fabrication process of germanium microgauges also has to be adjusted according to the particularities of metal substrates. A number of polycrystalline germanium strain microgauges of various dimensions are implemented on thin cylinders. The results of the fabrication process are presented. The existing constraints of the current process and the potential improvement measures are then discussed.