Introduction to microelectronic fabrication
Introduction to microelectronic fabrication
Microsystem design
Hi-index | 2.88 |
We present a simple method for producing molds for casting PDMS microfluidic chips using photo-lithography with 35mm photographic negatives as masks. We demonstrate the capabilities and limitations of the approach. We have optimized this procedure to create very good quality planar lab-on-chip structures and with this method can go from design to finished device in a day.