Single machine oriented match-up rescheduling method for semiconductor manufacturing system

Authors:
Fei Qiao;Li Li;Yumin Ma;Bin Shi
Affiliations:
School of Electronics & Information Engineering, Tongji University, Shanghai, China;School of Electronics & Information Engineering, Tongji University, Shanghai, China;School of Electronics & Information Engineering, Tongji University, Shanghai, China;School of Electronics & Information Engineering, Tongji University, Shanghai, China
Venue:
ICIRA'12 Proceedings of the 5th international conference on Intelligent Robotics and Applications - Volume Part II
Year:
2012

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Abstract

Due to the high uncertainty of semiconductor manufacturing system, its rescheduling problems are extremely difficult to solve. In this paper, we investigate a novel single machine oriented match-up rescheduling (SMUR) method that implement the partial repair rescheduling in a dynamic manufacturing environment. Both of SMUR principle and algorithm are discussed. Its effectiveness has been verified by a simulation study. Computational results show that the proposed method has better stability and efficiency compared with the right-shift rescheduling method.