Application of reproducing kernel particle method and element-free Galerkin method on the simulation of the membrane of capacitive micromachined microphone in viscothermal air

Authors:
Cheng-Ta Yang
Affiliations:
Department of Marine Engineering, National Kaohsiung Marine University, Kaohsiung, Taiwan, Republic of China 805
Venue:
Computational Mechanics
Year:
2013

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Abstract

Simulation of the microphone membrane determines whether highest yield and sensitivity is attainable when it comes to the field of microelectromechanical system (MEMS) capacitive microphone design. Consequently, it is significantly critical to predict and understand the behavior of the membrane in the air. The reproducing kernel particle method and element-free Galerkin, RKPM and EFG respectively, are introduced to differentiate from the traditional finite element method (FEM) since RKPM and EFG models are meshless to greatly improve the problems of FEM with large size aspect ratio. The result from a numerical axisymmetry model of 1 mm radius and 10 μm thickness membrane with fixed boundary condition upon 1 mm thickness viscothermal air is identical to that from the theoretical model. Finally, a MEMS axisymmetry model of a 180 μm radius and 10 μm thickness membrane upon 10 μm thickness viscothermal air is simulated in this paper.