Pattern projection profilometry with sinusoidal gratings under coherent illumination

  • Authors:

  • Elena Stoykova;Natalia Berberova;Joo Sup Park;Hoonjong Kang;Ventseslav Sainov

  • Affiliations:

  • Broadcasting & ICT R&D Division, Korea Electronics Technology Institute, Seoul, Korea and Institute of Optical Materials and Technologies, Bulgarian Academy of Sciences, Sofia, Bulgaria 1113;Institute of Optical Materials and Technologies, Bulgarian Academy of Sciences, Sofia, Bulgaria 1113;Broadcasting & ICT R&D Division, Korea Electronics Technology Institute, Seoul, Korea;Broadcasting & ICT R&D Division, Korea Electronics Technology Institute, Seoul, Korea;Institute of Optical Materials and Technologies, Bulgarian Academy of Sciences, Sofia, Bulgaria 1113

  • Venue:
  • 3D Research
  • Year:
  • 2013

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Abstract

The work considers the important issue of finding proper illumination geometry for pattern projection profilometric measurement with a sinusoidal grating under coherent divergent illumination. This is done by analysis of the Talbot carpets for gratings with phase or amplitude modulation at variable distance between the source and the grating at the assumption that the grating modulation depth ensures negligible contribution of the higher harmonics. The goal is to propose reliable procedure for choosing the most suitable elongation of the point source for a given grating and a given wavelength. The obtained dependences are verified by an experimental study of the quality of the projected fringes using a thin sinusoidal phase grating recorded on a silver-halide holographic plate. The result of the profilometric measurement with the recorded grating is also included.