A level set approach to a unified model for etching, deposition, and lithography II: three-dimensional simulations

  • Authors:
  • D. Adalsteinsson;J. A. Sethian

  • Affiliations:
  • -;-

  • Venue:
  • Journal of Computational Physics
  • Year:
  • 1995

Quantified Score

Hi-index 31.46

Visualization

Abstract