Fuzzy multiple attribute decision making: a review and new preference elicitation techniques
Fuzzy Sets and Systems - Special issue on fuzzy multiple criteria decision making
Quality Engineering Using Robust Design
Quality Engineering Using Robust Design
Information Processing and Management: an International Journal - Modelling vagueness and subjectivity in information access
Application of TOPSIS in evaluating initial training aircraft under a fuzzy environment
Expert Systems with Applications: An International Journal
Expert Systems with Applications: An International Journal
Optimization of a multi-response problem in Taguchi's dynamic system
Computers and Industrial Engineering
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The quality characteristics in the wafer fabrication process are diverse, variable, and fuzzy in nature. How to effectively deal with multiresponse quality problems in the wafer fabrication process is a challenging task. In this study, the fuzzy technique for order preference by similarity to an ideal solution (TOPSIS), one of the fuzzy multiattribute decision-analysis (MADA) methods, is proposed to investigate the fuzzy multiresponse quality problem in integrated-circuit (IC) wafer fabrication process. The fuzzy TOPSIS is one of the effective fuzzy MADA methods for dealing with decision-making problems under uncertain environments. First, a fuzzy TOPSIS methodology is developed by considering the ambiguity between quality characteristics. Then, a detailed procedure for the developed fuzzy TOPSIS approach is presented to show how the fuzzy wafer fabrication quality problems can be solved. Real-world data is collected from an IC semiconductor company and the developed fuzzy TOPSIS approach is applied to find an optimal combination of parameters. Results of this study show that the developed approach provides a satisfactory solution to the wafer fabrication multiresponse problem. This developed approach can be also applied to other industries for investigating multiple quality characteristics problems.