An experimental procedure for simulation response surface model identification
Communications of the ACM
Discrete-time signal processing
Discrete-time signal processing
Customer service in pull production systems
Operations Research
The impact of autocorrelation on queuing systems
Management Science
Principles of Discrete Event Simulation
Principles of Discrete Event Simulation
Simulation Modeling and Analysis
Simulation Modeling and Analysis
Statistical properties of MPEG video traffic and their impact on traffic modeling in ATM systems
LCN '95 Proceedings of the 20th Annual IEEE Conference on Local Computer Networks
Autocorrelation effects in manufacturing systems performance: a simulation analysis
Proceedings of the Winter Simulation Conference
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Due to the high complexity of semiconductor manufacturing systems simulation has become a useful tool for the performance analysis of these systems. However, there are some serious problems in analyzing simulation output data. For example, the quality of confidence intervals for certain performance measures is affected by correlations among the data. Furthermore, analyzing the correlation of simulation output data might give valuable hints for understanding the behavior of complex systems such as semiconductor manufacturing systems. In this paper we present examples where we have detected remarkable correlation phenomena, in the simulation output of semiconductor fabrication facilities caused by exo- or endogenous factors. Based on real specifications we examine several semiconductor manufacturing systems in steady state. First we calculate the autocorrelation function of the sequence of successive cycle times and then compute the corresponding frequency spectrum. By this means, periodicities in the simulation output data can efficiently be determined.