Statistical tools for simulation practitioners
Statistical tools for simulation practitioners
The multivariate metamodel in queuing system simulation
Computers and Industrial Engineering
Experimental design issues in simulation with examples from semiconductor manufacturing
WSC '92 Proceedings of the 24th conference on Winter simulation
The application of experimental design to the analysis of semiconductor manufacturing lines
WSC' 90 Proceedings of the 22nd conference on Winter simulation
Design of simulation experiments
WSC '84 Proceedings of the 16th conference on Winter simulation
Multivariate simulation output analysis: Past, present, and future
WSC '84 Proceedings of the 16th conference on Winter simulation
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The focus of the paper is on the application of an experimental design methodology to a semi-conductor manufacturing simulation model. A complex whole line simulation model of a semiconductor fab is built. Seventeen input factors are set for investigation through a 2-stage group-screening experimental design. A multiple response regression metamodel is built to define the relationships between the significant input factors and the four response variables of interest. The combination of simulation modeling methods with experimental design and regression analysis techniques allows the development of a flexible tool for capacity analysis of a semiconductor manufacturing facility.