Real-time stress evolution during Si1-xGex heteroepitaxy: dislocations, islanding, and segregation

• Authors:

• J. A. Floro;E. Chason;S. R. Lee;R. D. Twesten;R. Q. Hwang;L. B. Freund

• Affiliations:

• -;-;-;-;-;-

• Venue:
• Journal of Electronic Materials - Special issue on evolution and advanced characterization of thin film microstructures
• Year:
• 1997