Validation and verification of the simulation model of a photolithography process in semiconductor manufacturing

Authors:
Nirupama Nayani;Mansooreh Mollaghasemi
Affiliations:
Cirent Semiconductor, 9333 S. John Young Parkway, Orlando, FL;Department of Industrial Engineering and Management Systems, University of Central Florida, Orlando, FL
Venue:
Proceedings of the 30th conference on Winter simulation
Year:
1998

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