General simulation applications in semiconductor manufacturing: why do simple wafer fab models fail in certain scenarios?

  • Authors:
  • Oliver Rose

  • Affiliations:
  • University of Würzburg, 97074 Würzburg, GERMANY

  • Venue:
  • Proceedings of the 32nd conference on Winter simulation
  • Year:
  • 2000

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Abstract

Previous work has proved that simple simulation models are sufficient for analyzing the behavior of complex wafer fabs in certain scenarios. In this paper, we give an example where the simple model fails to accurately predict cycle times and WIP levels of the complex model. To determine the reason for this behavior, we analyze the correlation properties of a MIMAC full fab model and the corresponding simple one. It turns out that the simple model is not capable of capturing the correlations in an adequate way because there is lot overtaking (passing) in the simple model while almost no overtaking can be found in the complex counterpart.