Microsystem Technology and Microrobotics

Authors:
Sergej Fatikow;Ulrich Rembold
Affiliations:
-;-
Venue:
Microsystem Technology and Microrobotics
Year:
1997

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Abstract

From the Publisher:Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electrical, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household, and many other purposes. This is a basic introduction to MST. Well-illustrated, it is the first of its kind to cover MST in its entirety, including a survey of recently built products and recent developments.