Microsensors, Mems and Smart Devices

Authors:
Julian W. Gardner;Vijay K. Varadan
Affiliations:
-;-
Venue:
Microsensors, Mems and Smart Devices
Year:
2001

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Abstract

From the Publisher:From the electronic nose and the intelligent ear to the modern ink jet nozzle, the applications of smart devices incorporating microsensors are increasing rapidly. Microsensors are miniature devices that convert a non-electrical quantity into an electrical signal. By integrating a microsensor with a microprocessor, a smart sensor is produced. Further integration with a microactuator produces a microsystem with multifunctional electrical and mechanical components known as micro-electrical mechanical systems (MEMS).