Nanometer structure fabricated by FIB and its observation by STM

  • Authors:
  • M. Komuro;S. Okayama;O. Kitamura;W. Mizutani;H. Tokumoto

  • Affiliations:
  • -;-;-;-;-

  • Venue:
  • Microelectronic Engineering
  • Year:
  • 1987

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Abstract