A numerical method to simulate radio-frequency plasma discharges

Authors:
E. P. Hammond;K. Mahesh;P. Moin
Affiliations:
Department of Mechanical Engineering, Stanford University, Stanford, California 94305;Department of Aerospace Engineering and Mechanics, University of Minnesota, Minneapolis, Minnesota 55455;Department of Mechanical Engineering, Stanford University, Stanford, California 94305
Venue:
Journal of Computational Physics
Year:
2002

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Abstract

A fully conservative and efficient numerical algorithm is developed for fluid simulations of radio-frequency plasma discharges. Results are presented in one and multiple dimensions for a helium discharge. The algorithm produces accurate results even on fairly coarse grids without the use of numerical dissipation. The proposed electron flux discretization is more accurate and efficient than two of the most commonly used discretizations: low-order upwinding (M. S. Barnes, T. J. Colter, and M. E. Elta, 1987, J. Appl. Phys. 61, 81) and Scharfetter-Gummel (D. L. Scharfetter and H. K. Gummel, 1969, IEEE Trans. Electron Devices ED-16, 64).