Modeling and Hierarchical Neuro-Fuzzy Control for Flexure-Based Micropositioning Systems

Authors:
Lih-Chang Lin;Jia-Wei Sheu;Jia-Horng Tsay
Affiliations:
Department of Mechanical Engineering, National Chung Hsing University, Taichung, Taiwan 402, R.O.C.;Department of Mechanical Engineering, National Chung Hsing University, Taichung, Taiwan 402, R.O.C.;Department of Mechanical Engineering, National Chung Hsing University, Taichung, Taiwan 402, R.O.C.
Venue:
Journal of Intelligent and Robotic Systems
Year:
2001

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Abstract

The micropositioning system using flexural bearing (e.g., for wafer steppers and coarse-fine positioning systems) is a system of infinite degrees of freedom. It is difficult to design a controller for the partial differential equation of the system directly. In this paper, a closed-form dynamics model is first developed using the assumed modes method and the least squares method. Then, a hierarchical neuro-fuzzy controller using backpropagation (BP) training algorithm is proposed for the precision control and active damping of the micropositioning system. Simulation results show that the suggested strategy can actively suppress the flexible vibration and have high positioning performance.